Single wafer / Cluster tool components

   Products for RTP, CVD, EPI, and Etch chambers are made from Silicon, Alumina, and Quartz. These include a variety of bell jars, isolation chambers, domes, reactor tubes, liners, rings, shower heads, gas distribution plates, robot blades, end-effectors, etc. These parts may be machined and/or hot-fabricated by glassblowers, pending design requirements. These products are manufactured, cleaned, and packaged to OEM specs.

Note: Hayward Quartz manufactures chamber components on a direct-to-OEM basis only. OEM specifications are proprietary and confidential. End-users should contact their OEM directly for spare parts.